•Fully Automatic Loading:It supports automatic switching of Waffle Pack, Wafer Tray and JEDEC Tray.
•XYR Transfer & Alignment Module:It achieves alignment repeatability ≤±5μm and avoids chip damage from mechanical clamping aligners.
•Precision Compensation for DDR Motor (Angular Errors):It delivers positioning accuracy ≤±5 arcsec and repeatability ≤±1 arcsec after angular error compensation.
•Real-Time Traceability of Full-Cycle Wafer Map & Yield:It enables remote data monitoring and full-lifecycle traceability of production data with wafer map and yield tracking.
Applicable Industries:
Automotive Power Semiconductors, Optoelectronics, Advanced Packaging, Sensors, Consumer Electronics & IoT.
Capabilities & Features
| Item | Subitem | Technical Parameter |
|---|
| Inspection Target | Compatible Components | Bare Die |
| Compatible Size | 0.5mm × 0.5mm ~ 15mm × 15mm |
| Die Thickness | > 80μm |
| UPH | UP TO 15K |
| Loading | Wafer | 6"/8"/12" Wafer Frame / Grip Ring (Expansion Ring) |
| Tape & Reel | Φ180mm / Φ330mm |
| Tray | JEDEC Tray, Waffle Pack (2"/4") |
| Unloading | Option | One of the Following: JEDEC Tray, Waffle Pack (2"/4"), 6"/8" Wafer Frame / Grip-Ring (Expansion Ring) |
| Vision System | Algorithm | AI Deep Learning Algorithm; Traditional Algorithm |
| Camera Configuration | 5 MP / 25 MP (Option) |
| FOV | 17mm × 17mm |
| Inspection Capability | Min. Detectable Defect Size > 25μm / 10μm |
| Inspection Items | Defect Classification / OCR / Orientation / Pre-Seal Tape / Post-Seal Tape Inspection (Option) |
| Force Control System | Accuracy | 50g (0.5N) ~ 1000g (10N) ≤ ±10g +5% |
| Alignment System | Placement Accuracy | ±25μm@3σ, ±0.5°@3σ |
| Software System | Communication Interface | TCP/IP, GPIB, RS-232, TTL, SECS GEM |
| Equipment Dimensions | Full-Enclosure | 1600mm × 1900mm × 1900mm |
FAQ:
Q: What is the maximum UPH of SC6000?
A: It reaches up to 30K UPH to meet high-volume wafer-level mass production demands.
Q: What is the placement accuracy and inspection capability?
A: It features placement accuracy of ±25μm@3σ and minimum detectable defect size down to 10μm.
Q: What incoming formats does SC6000 support?
A: It is compatible with Wafer, Tray and Tape & Reel (T&R) for flexible material loading.
Q: What advantages does the DDR motor angular error compensation bring?
A: It delivers positioning accuracy ≤±5 arcsec and repeatability ≤±1 arcsec for ultra-precise rotation control.