The EC400 Series is recommended for automated defect inspection of optical chips and CoC components before or after critical packaging processes.
① Automated multi-side inspection for LD, PD, PIC, TIA and CoC components;
② Non-contact handling helps reduce scratches, contamination and ESD-related damage;
③ Provides 2D inspection accuracy up to ±0.5 μm and 3D inspection accuracy up to ±1 μm;
④ Supports defect mapping, production statistics, product traceability and optional MES/SECS/GEM communication.
Explore the EC400 Series